2.
Measurement Process Characterization
2.6.
Case studies
2.6.2.
Check standard for resistivity measurements
2.6.2.1.
Background and data
2.6.2.1.1.
|
Database for resistivity check standard
|
|
|
Description of check standard |
A single wafer (#137), chosen at random from a batch of 130 wafers, is
the check standard for resistivity measurements at the 100 ohm.cm level
at the National Institute of Standards and Technology. The average of
six measurements at the center of the wafer is the check standard value
for one occasion, and the standard deviation of the six measurements is
the short-term standard deviation. The columns of the database
contain the following:
- Crystal ID
- Check standard ID
- Month
- Day
- Hour
- Minute
- Operator
- Humidity
- Probe ID
- Temperature
- Check standard value
- Short-term standard deviation
- Degrees of freedom
The reader can download the
data as a text file.
|
|
Database of measurements on check standard
|
Crystal Waf Mo Da Hr Mn Op Hum Probe Temp Avg Stddev DF
51939 137 03 24 18 01 drr
42 2362 23.003 97.070 0.085 5
51939 137 03 25 12 41 drr
35 2362 23.115 97.049 0.052 5
51939 137 03 25 15 57 drr
33 2362 23.196 97.048 0.038 5
51939 137 03 28 10 10 JMT
47 2362 23.383 97.084 0.036 5
51939 137 03 28 13 31 JMT
44 2362 23.491 97.106 0.049 5
51939 137 03 28 17 33 drr
43 2362 23.352 97.014 0.036 5
51939 137 03 29 14 40 drr
36 2362 23.202 97.047 0.052 5
51939 137 03 29 16 33 drr
35 2362 23.222 97.078 0.117 5
51939 137 03 30 05 45 JMT
32 2362 23.337 97.065 0.085 5
51939 137 03 30 09 26 JMT
33 2362 23.321 97.061 0.052 5
51939 137 03 25 14 59 drr
34 2362 22.993 97.060 0.060 5
51939 137 03 31 10 10 JMT
37 2362 23.164 97.102 0.048 5
51939 137 03 31 13 00 JMT
37 2362 23.169 97.096 0.026 5
51939 137 03 31 15 32 JMT
35 2362 23.156 97.035 0.088 5
51939 137 04 01 13 05 JMT
34 2362 23.097 97.114 0.031 5
51939 137 04 01 15 32 JMT
34 2362 23.127 97.069 0.037 5
51939 137 04 01 10 32 JMT
48 2362 22.963 97.095 0.032 5
51939 137 04 06 14 38 JMT
49 2362 23.454 97.088 0.056 5
51939 137 04 07 10 50 JMT
34 2362 23.285 97.079 0.067 5
51939 137 04 07 15 46 JMT
33 2362 23.123 97.016 0.116 5
51939 137 04 08 09 37 JMT
33 2362 23.373 97.051 0.046 5
51939 137 04 08 12 53 JMT
33 2362 23.296 97.070 0.078 5
51939 137 04 08 15 03 JMT
33 2362 23.218 97.065 0.040 5
51939 137 04 11 09 30 JMT
36 2362 23.415 97.111 0.038 5
51939 137 04 11 11 34 JMT
35 2362 23.395 97.073 0.039 5
|
