2. Measurement Process Characterization
2.6. Case studies
2.6.1. Gauge study of resistivity probes

2.6.1.3.

Repeatability standard deviations

Run 1 - Graph of repeatability standard deviations for probe #2362 -- 6 days and 5 wafers showing that repeatability is constant across wafers and days
Run 2 - Graph of repeatability standard deviations for probe #2362 -- 6 days and 5 wafers showing that repeatability is constant across wafers and days
Run 1 - Graph showing repeatability standard deviations for five probes as a function of wafers and probes	Symbols for codes: 1 = #1; 2 = #281; 3 = #283; 4 = #2062; 5 = #2362
Run 2 - Graph showing repeatability standard deviations for 5 probes as a function of wafers and probes	Symbols for probes: 1 = #1; 2 = #281; 3 = #283; 4 = #2062; 5 = #2362