2. Measurement Process Characterization
2.6. Case studies

2.6.1.

Gauge study of resistivity probes

Purpose

The purpose of this case study is to outline the analysis of a gauge study that was undertaken to identify the sources of uncertainty in resistivity measurements of silicon wafers.

Outline

1. Background and data
2. Analysis and interpretation
3. Graphs showing repeatability standard deviations
4. Graphs showing day-to-day variability
5. Graphs showing differences among gauges
6. Run this example yourself with Dataplot
7. Dataplot macros